Handbook of Thin Film Process Technology —— 98/2 Recipes for Optical Materials

----- 光学材料薄膜加工技术手册98/2

ISBN: 9781315893693 出版年：2018 页码：136 Glocker, D CRC Press

The Handbook of Thin Film Process Technology is a practical handbook for the thin film scientist, engineer and technician. This handbook is regularly updated with new material, and this volume presents additional recipe-type information (i.e. important deposition system details and process parameters) for optical materials.