Handbook of Thin Film Process Technology —— 98/1 Reactive Sputtering

----- 薄膜工艺技术手册98/1反应溅射

ISBN: 9781315893686 出版年：2018 页码：90 Glocker, David A CRC Press

The Handbook of Thin Film Process Technology is a practical handbook for the thin film scientist, engineer and technician. This handbook is regularly updated with new material, and this volume is a special issue on reactive sputtering which will be of interest to a wide range of industrial and academic researchers in addition to owners of the main Handbook. Some recent developments in the reactive sputtering field are covered, including unbalanced magnetron sputtering and pulsed reactive sputtering. The articles contain a wealth of practical information relating to applications, practice and manufacturing techniques.