Thin Film Materials Technology —— Sputtering of Compound Materials

----- 薄膜材料技术：化合物材料的溅射

ISBN: 9780815514831 出版年：2004 页码：533 Wasa, Kiyotaka Kitabatake, Makoto Adachi, Hideaki William Andrew_RM

An invaluable resource for industrial science and engineering newcomers to sputter deposition technology in thin film production applications, this book is rich in coverage of both historical developments and the newest experimental and technological information about ceramic thin films, a key technology for nano-materials in high-speed information applications and large-area functional coating such as automotive or decorative painting of plastic parts, among other topics. In seven concise chapters, the book thoroughly reviews basic thin film technology and deposition processes, sputtering processes, structural control of compound thin films, and microfabrication by sputtering.