Nanofabrication by Ion-Beam Sputtering —— Fundamentals and Applications

----- 离子束溅射纳米制造的基本原理及应用

ISBN: 9789814303750 出版年：2012 页码：366 Jenny Stanford Publishing

Considerable attention has been paid to ion beam sputtering as an effective way to fabricate self-organized nano-patterns on various substrates. The significance of this method for patterning surfaces is that the technique is fast, simple, and less expensive. The possibility to create patterns on very large areas at once makes it even more attracti