Nanofabrication Using Focused Ion and Electron Beams —— Principles and Applications

----- 利用聚焦离子和电子奈米制造光束：原理及应用

ISBN: 9780199734214 出版年：2012 页码：830 Oxford University Press

This book comprehensively reviews the achievements and potentials of a minimally invasive, three-dimensional, and maskless surface structuring technique operating at nanometer scale by using the interaction of focused ion and electron beams (FIB/FEB) with surfaces and injected molecules.