Adhesion Aspects in MEMS/NEMS

ISBN: 9789004190948 出版年：2011 页码：424 CRC Press

Phenomena associated with the adhesion interaction of surfaces have been a critical aspect of micro- and nanosystem development and performance since the first MicroElectroMechanicalSystems(MEMS) were fabricated. These phenomena are ubiquitous in nature and are present in all systems, however MEMS devices are particularly sensitive to their effects