MEMS/NEMS Nano Technology

ISBN: 9783037851753 出版年：2011 页码：812 Trans Tech Publications Ltd

This book brings together over 153 peer-reviewed papers, grouped into 6 chapters: Micro-/Nano-Fabrication and Measurement Technologies, Micro-Sensors and Actuators, Microfluidic Devices and Systems, MEMS/NENS and Applications, Nano-Material Research / Nanotubes / Nanowire Devices, Micropower Technology, Theories in Micro-/Nano-Technologies. Most of the papers are authored by Chinese researchers, and the volume thus offers a good overview of the research on MEMS and nano-technology being conducted in China. The work will be of great interest to researchers, graduate students and engineers who are working in the fields of MEMS and nano-technology.