Micro and Nano Technology

ISBN: 9780878493395 出版年：2009 页码：502 Trans Tech Publications Ltd

This volume presents a selection of over 98 peer-reviewed papers from the 1st International Conference of CSMNT, held on Nov. 19-22, 2008, in P.R. China.It is focussed entirely on the Micro/Nano field, and acquaints the reader with the latest development in MEMS and nanotechnology.It will thus be a great help to those working in this specialist field.