Resonant MEMS —— Fundamentals, Implementation, and Application

----- 共振微机电系统(Mems)原理、建模、实施与应用

ISBN: 9783527335459 出版年：2015 页码：512 Oliver Brand Isabelle Dufour Wiley

Part of the AMN book series, this book covers the principles, modeling and implementation as well as applications of resonant MEMS from a unified viewpoint. It starts out with the fundamental equations and phenomena that govern the behavior of resonant MEMS and then gives a detailed overview of their implementation in capacitive, piezoelectric, thermal and organic devices, complemented by chapters addressing the packaging of the devices and their stability. The last part of the book is devoted to the cutting-edge applications of resonant MEMS such as inertial, chemical and biosensors, fluid properties sensors, timing devices and energy harvesting systems.