MEMS —— Fundamental Technology and Applications

----- MEMS：基本技术及应用

ISBN: 9781138072305 出版年：2017 页码：465 CRC Press

Breakthrough Technology Microsystems to Nano-Microsystems: A Technological Breakthrough Hauden Daniel HfO2-Based High-kappa Dielectrics for Use in MEMS Applications Bing Miao, Rajat Mahapatra, Nick Wright, and Alton Horsfall Piezoelectric Thin Films for MEMS Applications Isaku Kanno CMOS Systems and Interfaces for sub-deg/hr Microgyroscopes Ajit Sharma, Mohammad Faisal Zaman, and Farrokh Ayazi Bulk Acoustic Wave Gyroscopes Houri Johari Mechanically Flexible Interconnects and TSVs: Applications in CMOS/MEMS Integration Hyung Suk Yang, Paragkumar Thadesar, Chaoqi Zhang, and Muhannad Bakir Modeling of Piezoelectric MEMS Vibration Energy Harvesters Marcin Marzencki and Skandar Basrour Interface Circuits for Capacitive MEMS Gyroscopes Hongzhi Sun and Huikai Xie Electromechanical Loops for High-Performance and Robust Gyroscope System Design Vikas Choudhary, Abhinav Dikshit, Anjan Kumar, Deva Phanindra Kumar, Saravanan Kamatchi, and Nemai Biswas MEMS-Based Novel Applications Bulk Acoustic Wave Resonators for Mobile Communication Systems Sumy Jose Wideband Ultrasonic Transmitter and Sensor Array for In-Air Applications J.R. Gonzalez, Mohamed Saad, and Chris J. Bleakley MEMS-Based Lamellar Grating Fourier Transform Spectrometers Hongbin Yu, Guangya Zhou, and Fook Siong Chau Microelectromechanical Resonators for RF Applications Frederic Nabki, Tomas A. Dusatko, and Mourad N. El-Gamal Rigid Body Motion Capturing by Means of Wearable Inertial and Magnetic MEMS Sensor Assembly-From Reconstitution of the Posture toward Dead Reckoning: An Application in Bio-Logging Hassen Fourati, Noureddine Manamanni, Lissan Afilal, and Yves Handrich Radio-Controlled Wireless MEMS Actuators and Applications Mohamed Sultan Mohamed Ali and Kenichi Takahata Advanced MEMS Technologies for Tactile Sensing and Actuation M. Amato, Massimo De Vittorio, and S. Petroni MEMS-Based Micro Hot-Plate Devices Jurgen Hildenbrand, Andreas Greiner, and Jan G. Korvink A Wireless Sensor Networks Enabled Inertial Sensor Yao-Chiang Kan Passive Radio-Frequency Acoustic Sensors and Systems for Wired and Wireless Applications Sylvain Ballandras, Gilles Martin, Jean-Michel Friedt, Victor Plessky, Virginie Blondeau-Patissier, William Daniau, Thomas Baron, Luc Chommeloux, Stephane Tourette, Jean-Francois Leguen, Bruno Francois, Christophe Droit, Meddy Vanotti, Marc Lamothe, David Rabus, Nicolas Chretien, and Emile Carry Index