Practical Guide to RF-MEMS

ISBN: 9783527335640 出版年：2013 页码：362 Jacopo Iannacci Wiley

PREFACE RF-MEMS APPLICATIONS AND THE STATE OF THE ART Introduction A Brief History of MEMS and RF-MEMS from the Perspective of Technology RF-MEMS Lumped Components RF-MEMS Complex Networks Modeling and Simulation of RF-MEMS Devices Packaging of RF-MEMS Brief Overview of Exploitation of RF-MEMS in RF Systems Conclusions THE BOOK IN BRIEF Introduction A Brief Introduction to the FBK RF-MEMS Technology An RF-MEMS Series Ohmic Switch (Dev A) RF-MEMS Capacitive Switches/Varactors Conclusions DESIGN Introduction Design Rules of the Fondazione Bruno Kessler RF-MEMS Technology Design of an RF-MEMS Series Ohmic Switch (Dev A) Generation of 3D Models Starting from the 2D Layout Conclusions SIMULATION TECHNIQUES (COMMERCIAL TOOLS) Introduction Static Coupled Electromechanical Simulation of the RF-MEMS Ohmic Switch (Dev A) in ANSYS Multiphysics Modal Analysis of the RF-MEMS Capacitive Switch (Dev B2) in ANSYS Multiphysics Coupled Thermoelectromechanical Simulation of the RF-MEMS Ohmic Switch with Microheaters (Dev C) in ANSYS Multiphysics RF Simulation (S-parameters) of the RF-MEMS Variable Capacitor (Dev B1) in ANSYS HFSS? Conclusions ON-PURPOSE SIMULATION TOOLS Introduction MEMS Compact Model Library A Hybrid RF-MEMS/CMOS VCO Excerpts of Verilog-A Code Implemented for MEMS Models Conclusions PACKAGING AND INTEGRATION Introduction A WLP Solution for RF-MEMS Devices and Networks Encapsulation of RF-MEMS Devices Fabrication Run of Packaged Test Structures Electromagnetic Characterization of the Package Influence of Uncompressed ACA on the RF Performance of Capped MEMS Devices Conclusions POSTFABRICATION MODELING AND SIMULATIONS Introduction Electromechanical Simulation of an RF-MEMS Varactor (Dev B2) with Compact Models RF Modeling of an RF-MEMS Varactor (Dev B2) with a Lumped Element Network Electromechanical Modeling of an RF-MEMS Series Ohmic Switch (Dev A) with Compact Models Electromagnetic Modeling and Simulation of an RF-MEMS Impedance- Matching Network (Dev E) for a GSM CMOS Power Amplifier Electromagnetic Simulation of an RF-MEMS Capacitive Switch (Dev B1) in ANSYS HFSS Electromagnetic Simulation of a MEMS-Based Reconfigurable RF Power Attenuator (Dev D) in ANSYS HFSS Conclusions APPENDIX A RIGID PLATE ELECTROMECHANICAL TRANSDUCER (COMPLETE MODEL) Introduction Mechanical Model of the Rigid Plate with Four DOFs Extension of the Mechanical Model of the Rigid Plate to Six DOFs Contact Model for Rigid Plates with Four and Six DOFs Electrostatic Model of the Rigid Plate Electrostatic Model of the Plate with Holes Electrostatic Model of the Fringing Effect Viscous Damping Model Conclusions APPENDIX B FLEXIBLE STRAIGHT BEAM (COMPLETE MODEL) Mechanical Model of the Flexible Beam with Two Degrees of Freedom Mechanical Model of the Flexible Beam with 12 DOFs Complete Mechanical Model of the Euler Beam with 12 DOFs ElectrostaticModel of the Euler Beamwith 12 DOFs Viscous Damping Model Conclusions INDEX