Microengineering, MEMS, and Interfacing —— A Practical Guide

----- 微型工程、微机电系统与界面：实用指南

ISBN: 9780367391027 出版年：2006 页码：353 Banks, Danny CRC Press

MEMS devices are finding increasingly widespread use in a variety of settings, from chemical and biological analysis to sensors and actuators in automotive applications. Along with this massive growth, the field is still experiencing growing pains as fabrication processes are refined and new applications are attempted. Anyone serious about entering