MEMS —— A Practical Guide to Design, Analysis and Applications

----- 微米机电系统（MEMS）：设计、分析与应用实用指南

ISBN: 9780815514978 出版年：2005 页码：993 Korvink, Jan Paul, Oliver William Andrew_RM

Microtransducer Operation.- Material Properties: Measurement and Data.- MEMS and NEMS Simulation.- System-Level Simulation of Microsystems.- Thermal-Based Microsensors.- Photon Detectors.- Free-Space Optical MEMS.- Integrated Micro-Optics.- Microsensors for Magnetic Fields.- Mechanical Microsensors.- Semiconductor-Based Chemical Microsensors.- Microfluidics.- Biomedical Systems.- Microactuators.- Micromachining Technology.- LIGA Technology for R&D and Industrial Applications.- 17 Interface Circuitry and Microsystems.