Plasma-Aided Nanofabrication —— From Plasma Sources to Nanoassembly

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ISBN: 9783527611560 出版年：2007 页码：317 Ken Ostrikov Shuyan Xu Wiley

In this single work to cover the use of plasma as nanofabrication tool in sufficient depth internationally renowned authors with much experience in this important method of nanofabrication look at reactive plasma as a nanofabrication tool, plasma production and development of plasma sources, as well as such applications as carbon-based nanostructures, low-dimensional quantum confinement structures and hydroxyapatite bioceramics. Written principally for solid state physicists and chemists, materials scientists, and plasma physicists, the book concludes with the outlook for such applications.