Silicon Carbide and Related Materials 2014

ISBN: 9783038354789 出版年：2015 页码：1,060 Trans Tech Publications Ltd

Collection of selected, peer reviewed papers from the european conference on silicon carbide & related materials (ECSCRM 2014), september 21-25, 2014, grenoble, france. The 243 papers are grouped as follows: i. Sic growth; i.1 bulk growth; i.2 epitaxial and thin film growth; II. Sic theory and characterization; II.1 fundamental and material properties; II.2 point and extended defects; II.3 surfaces and interfaces; III. Sic processing; III.1 doping, implantation and contact; III.2 dielectric growth and characterization; III.3 etching and machining; IV. Sic devices; IV.1 diodes; IV.2 field effect transistors; IV.3 other devices; v. Related materials; v.1 other carbon based materials; v.2 nitrides and other materials.