Plasma Properties, Deposition and Etching

ISBN: 9780878496709 出版年：1993 页码：747 Trans Tech Publications Ltd

Containing 42 invited papers, this fine book covers a broad range of subjects on plasmas and applications.In the first section, plasma properties and methods used to characterize the plasma are addressed. Many of these papers also cover deposition or etching of particular materials. The second part focuses on the application of various plasma techniques used to deposit thin films, and on the resulting film properties. Finally, the application of plasma etching to the fabrication of silicon-based circuits, plasma etching of III-V compound semiconductors and other processing applications are discussed in the third and last section.