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Materials Processing by Cluster Ion Beams —— History, Technology, and Applications

----- 通过集群离子束的材料加工:历史、技术与应用

ISBN: 9781498711753 出版年:2015 页码:258 Yamada, Isao CRC Press

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Materials Processing by Cluster Ion Beams: History, Technology, and Applications discusses the contemporary physics, materials science, surface engineering issues, and nanotechnology capabilities of cluster beam processing. Written by the originator of the gas cluster ion beam (GCIB) concept, this book:Offers an overview of ion beam technologies, f

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