Materials Science Applications of Ion Beam Techniques

ISBN: 9780878497676 出版年：1997 页码：488 Trans Tech Publications Ltd

The first particle accelerators were built in the early 1930鈥檚. For a long time, these devices were used exclusively by nuclear physicists. In the 1960鈥檚, extensive developments in measuring techniques occurred, mainly as a result of newly developed semiconductor devices. Further strong interest arose from the semiconductor industry, and ion implantation became widely accepted as being the ultimate tool for si-based device fabrication.