MEMS —— Introduction and Fundamentals

----- MEMS:导论与基础

ISBN: 9780849391378 出版年：2005 页码：494 CRC Press

As our knowledge of MEMS continues to grow, so does The MEMS Handbook. The field has changed so much that this Second Edition is now available in three volumes. Individually, each volume provides focused, authoritative treatment of specific areas of interest. Together, they comprise the most comprehensive collection of MEMS knowledge available, pac