Wafer Manufacturing: Shaping of Single Crystal Silicon Wafers

ISBN: 9780470061213 出版年：2020 页码：307 Imin Cao Milind Bhagavat Wiley

Presenting all the major stages in wafer manufacturing, from crystals to prime wafers. This book first outlines the physics, associated metrology, process modelling and quality requirements and the goes on to discuss wafer forming and wafer surface preparation techniques.  The whole is rounded off with a chapter on the research and future challenges in wafer manufacturing.