Laser Crystallization of Silicon - Fundamentals to Devices

ISBN: 9780127521848 出版年：2003 页码：215 Nickel, Norbert H Academic Press_RM

This book on the Laser Crystallization of Silicon reviews the latest experimental and theoretical studies in the field. It has been written by recognised global authorities and covers the most recent phenomena related to the laser crystallization process and the properties of the resulting polycrystalline silicon. Reflecting the truly interdisciplinary nature of the field that the series covers, this volume will continue to be of great interest to physicists, chemists, materials scientists and device engineers in modern industry. Valuable applications for industry, particularly in the fabrication of thin-film electronicsEach chapter has been peer reviewedAn important and timely contribution to the semiconductor literature