Laser Microfabrication —— Thin Film Processes and Lithography

----- 激光微加工:薄膜工艺和光刻

ISBN: 9780122334306 出版年：1989 页码：602 Academic Press_RM

This book reviews the solid core of fundamental scientific knowledge on laser-stimulated surface chemistry that has accumulated over the past few years. It provides a useful overview for the student and interested non-expert as well as essential reference data (photodissociation cross sections, thermochemical constants, etc.) for the active researcher.