Fundamentals of Laser Micromachining

ISBN: 9781439860557 出版年：2016 页码：249 Schaeffer, Ronald CRC Press

Introduction Laser Theory and Operation Brief Review of Laser Physics CO2 Lasers Solid-State Nd3+ Lasers Excimer Lasers Fiber Lasers Disk Lasers Ultrashort Pulse (USP) Lasers Comparisons of Laser Sources Optics Optics Beam Delivery Systems-Imaging and Focusing Steps to an Effective Optical Setup Light-Material Interaction Photoablation and Material Interaction with UV Light Thermal Effects Taper Fluence System Integration Processing System Considerations General Requirements Part Viewing Systems Motion Control Part Handling Laser Support Systems Software Safety Discussion of Some Processing Techniques Aligning to Fiducials Laser Drilling Large Numbers of Really Small, High-Aspect Ratio Holes Gas Assist Micromarking Patterning Thin Films Multiple Hole Drilling Using Galvos In-Volume Selective Laser Etching (ISLE) Applications Microelectronics and Semiconductors Medical Devices Defense/Aerospace Renewable Energy Other Materials Metals Ceramics Glasses Silicon and Gallium Arsenide Polymers Diamond Metrology and Cleaning Metrology Postlaser Cleaning Conclusion Appendix: Additional Reading Index