CMOS Nanoelectronics —— Innovative Devices, Architectures, and Applications

----- Cmos纳米电子学：创新的设备，架构和应用程序

ISBN: 9789814364027 出版年：2012 页码：444 Jenny Stanford Publishing

This book covers one of the most important device architectures that have been widely researched to extend the transistor scaling: FinFET. Starting with theory, the book discusses the advantages and the integration challenges of this device architecture. It addresses in detail the topics such as high-density fin patterning, gate stack design, and s