Thin Film Analysis by X-Ray Scattering

ISBN: 9783527310524 出版年：2006 页码：380 Mario Birkholz Wiley

Preface. Symbols. 1 Principles of X-ray Diffraction. 1.1 The Basic Phenomenon. 1.2 The &theta /2&theta Scan. 1.3 Intensity of Bragg Ref lections. 1.4 Applications. 2 Identification of Chemical Phases. 2.1 Histogram-Based Techniques. 2.2 Linear Attenuation Coefficient &mu . 2.3 Determination and Interpretation of the &mu t Product. 2.4 Analysis of Phase Mixtures. 2.5 Amorphous Thin Films. 2.6 Accurate Determination of Lattice Parameter. 2.7 Applications. 3 Line Profile Analysis. 3.1 Model Functions and Peak Parameters. 3.2 Instrumental Line Profile. 3.3 Deconvolution by Fourier Techniques. 3.4 Ref lection Broadening by Small Crystallite Size Only. 3.5 Concomitant Occurrence of Size and Strain Broadening. 3.6 Applications. 4 Grazing Incidence Configurations. 4.1 Grazing Incidence X-ray Diffraction (GIXRD). 4.2 Penetration Depth and Information Depth. 4.3 Depth-Dependent Properties. 4.4 Refractive Index for X-rays. 4.5 Total External Ref lection and Critical Angle. 4.6 X-ray Reflectivity (XRR). 4.7 Grazing Incidence Diffraction (GID). 4.8 Applications. 5 Texture and Preferred Orientation. 5.1 Texture Factors. 5.2 Pole Figures. 5.3 Measurement of Pole Figures. 5.4 Directions, Orientations and Inverse Pole Figures. 5.5 Fiber Textures or Layer Textures. 5.6 Biaxial and Fully General Textures. 5.7 Depth Dependence of Thin-Film Textures. 5.8 Applications. 6 Residual Stress Analysis (Mario Birkholz and Christoph Genzel). 6.1 Ceiiinnosssttuv. 6.2 Fundamental Equation of XSA. 6.3 Measurement of d&Psi Distributions. 6.4 Diffraction Elastic Constants (DECs) s 1 and 1/2s 2 . 6.5 Grain Interaction Models. 6.6 The Effect of Texture. 6.7 Classification of Stresses. 6.8 Effect of Residual Stress Gradients. 6.9 Detection of Residual Stress Gradients in Thin Films. 6.10 Applications. 7 High-Resolution X-ray Diffraction (Mario Birkholz and Paul F. Fewster). 7.1 Strain, Strain Relaxation and Composition in Epitaxial Layers. 7.2 High-Resolution Rocking Curves. 7.3 Mosaicity and Extinction. 7.4 Dynamical Theory of Ewald and Extensions. 7.5 High-Resolution Rocking Curves and Profiles from Layer Structures. 7.6 Reciprocal Space Mapping. 7.7 Diffuse Scattering. 7.8 Extensions to High-Resolution Diffraction.