Collection of selected, peer reviewed papers from the 5th international conference on advanced micro-device engineering 2013 (AMDE 2013), december 19, 2013, kiryu, japan. The 28 papers are grouped as follows: i. Micro- and nano-science and technologies; II. Photonic and magnetic materials and devices; III. Electronics, microelectronics and communication; IV. Novel methods and devices for measurements; v. Medical science and health security.
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