Collection of selected, peer reviewed papers from the 11th international symposium on measurement technology and intelligent instruments (ismtii 2013), july 1-3, 2013, aachen, germany. the 60 papers are grouped as follows: chapter 1: metrology for si, chapter 2: position & displacement metrology, chapter 3: micro- and nanometrology, chapter 4: macrometrology, chapter 5: optical metrology, chapter 6: sensors and actuators, chapter 7: material properties' characterization, chapter 8: intelligent instruments for automation, chapter 9: management of measurement processes, chapter 10: calibration and machine tool performance, chapter 11: trends in production technology, chapter 12: measurements, modeling and simulation in the humanitarian field.
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