Silicon Science and Advanced Micro-Device Engineering II

ISBN: 9783037852859 出版年：2011 页码：322 Trans Tech Publications Ltd

This special collection of 39 peer-reviewed papers imparts the latest findings related to silicon science and advanced micro-device engineering. The papers are grouped into the chapters: Materials Science; Chemical Science and Technology; Nano-Science and Technology; Photonic Devices and Technology; Novel Measurement and System Technology; Information and Communication Engineering; thus offering an up-to-date overview of the subject matter.