Green Composite Materials, Polymers and Nanotechnology

ISBN: 9783035716894 出版年：2020 页码：207 Chaorong Li Trans Tech Publications Ltd

32in full high definition display devices based on back-channel etch IGZO TFTs were prepared. The mechanism of interlayer peeling defect in IGZO TFTs formation was studied. It turns out that the passivation layer was peeling with the underlying source electrode, which caused an interruption in signal transmission. Relevant process improvements were implemented, and the interlayer peeling defect in IGZO TFTs was solved.