Beam Injection Assessment of Defects in Semiconductors

ISBN: 9783908450399 出版年：1998 页码：542 Trans Tech Publications Ltd

The 5th international workshop on beam injection assessment of defects in semiconductors (BIADS 98) focussed on many theoretical and experimental aspects of this topic. The aim was to bring together specialists working in the fields of both fundamental research and applications. There were more than 80 participants from 15 countries all over the world.