Properties and Characterization of Amorphous Carbon Films

ISBN: 9780878496044 出版年:1991 页码:709 Trans Tech Publications Ltd

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内容简介

Amorphous, hydrogenated carbon (AHC) films can be deposited on various substrates using several techniques, e.G. Plasma deposition and ion beam deposition. The resulting films can be hard, wear resistant and transparent.

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