This special volume is devoted to the new and fast evolving field of physics and technology of functional nanomaterials and devices. The published review and original research papers contain new experimental and theoretical results in the field of fabrication and utilization of functional nanomaterials and devices for modern micro- and nanoelectronics with special emphasis on technology, physics and diagnostics. The problems of application of new materials, structures and devices for low power consumption and energy harvesting as well as for nanosensors (of pressure, temperature, biological species), optoelectronic devices and micro/nano-mechanical systems are addressed and discussed.
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