Advances In Multiphysics Simulation And Experimental Testing Of Mems

ISBN: 9781860948626 出版年：2008 页码：504 Attilio Frangi Subrata Mukherjee World Scientific Publishing Company

This volume takes a much needed multiphysical approach to the numerical and experimental evaluation of the mechanical properties of MEMS and NEMS. The contributed chapters present many of the most recent developments in fields ranging from microfluids and damping to structural analysis, topology optimization and nanoscale simulations. The book responds to a growing need emerging in academia and industry to merge different areas of expertise towards a unified design and analysis of MEMS and NEMS.