Amorphous Silicon Carbide Thin Films: Deposition, Characterization, Etching and Piezoresistive Sensors Applications

ISBN: 9781613247747 出版年：2011 页码：120 Mariana Amorim Fraga Nova Science

Silicon carbide (SiC) has been described as a suitable semiconductor material to use in MEMS and electronic devices for harsh environments. In recent years, many developments in SiC technology as bulk growth, materials processing, electronic devices and sensors have been shown. Moreover, some studies show the synthesis, characterization and processing of crystalline SiC films. However, few works have investigated the potential of amorphous silicon carbide (a-SiC) thin films for sensors applications. This book presents fundamentals of amorphous silicon carbide thin films and their applications in piezoresistive sensors for high temperature applications.