Chemical Vapor Deposition (CVD): Types, Uses and Selected Research

ISBN: 9781536108934 出版年：2017 页码：138 Monica Powell Nova Science

This book provides new research on types and uses of chemical vapor deposition (CVD). Chapter One focuses on the synthesis and characteristics of carbon nanofibers based on phenolic resin and transition metal catalysts by CVD. Chapter Two provides an overview of different reactor types that have been proved to be viable options for graphene growth. Chapter Three outlines the significance of atmospheric pressure chemical vapor deposition technology in large area graphene electrodes and demonstrates their use in lithium ion batteries towards the advancement of their performance. Chapter Four analyzes low-energy plasma CVD for epitaxy and in-situ doping of group-IV semiconductors in nanoelectronics.