Microelectronics to Nanoelectronics —— Materials, Devices & Manufacturability

----- 纳米电子的微电子学：材料、设备与工艺性

ISBN: 9781466509542 出版年：2017 页码：445 CRC Press

Moore's Law: Technology Scaling and Reliability Challenges, T. Nigam, K.-Y. Yiang, and A. Marathe Scaling and Radiation Effects in Silicon Transistors, A.H. Johnston and L.Z. Scheick Hewlett-Packard's MEMS Technology: Thermal Inkjet Printing and Beyond, J. Stasiak, S. Richards, and P. Benning Silicon MEMS Resonators for Timing Applications, B. Kim, M.A. Hopcroft, and R.N. Candler Nanoscale Electromechanical Devices Enabled by Nanowire Structures, P. X.-L. Feng Silicon Etching and Etch Techniques for NEMs and MEMs, M.D. Henry and A. Scherer Learning from Biology: Viral-Templated Materials and Devices, E.D. Haberer Principles and Methods for Integration of Carbon Nanotubes in Miniaturized Systems, A.J. Hart, S.J.Park, M. F.L. de Volder, S.H. Tawfick, and E.R. Meshot Heterogeneous Integration of Carbon Nanotubes on Complementary Metal Oxide Semiconductor Circuitry and Sensing Applications, C.-L. Chen, S. Sonkusale, M. Chen, and M.R. Dokmeci NEMS-Based Ultra Energy-Efficient Digital ICs: Materials, Device Architectures, Logic Implementation, and Manufacturability, H.F. Dadgour and K. Banerjee Carbon Nanotube Y-Junctions, P.R. Bandaru Nanoscale Effects in Multiphase Flows and Heat Transfer, N. Singh, D. Shin, and D. Banerjee Nanoengineered Material Applications in Electronics, Biology, and Energy Harnessing, D.S. Choi, Z. Zhang, and N. Pachauri