Handbook of Optical Dimensional Metrology

ISBN: 9781439854815 出版年：2016 页码：497 CRC Press

Due to their speed, data density, and versatility, optical metrology tools play important roles in today's high-speed industrial manufacturing applications. Handbook of Optical Dimensional Metrology provides useful background information and practical examples to help readers understand and effectively use state-of-the-art optical metrology methods