Developments in Surface Contamination and Cleaning, Volume 3 —— Methods for Removal of Particle Contaminants

----- 表面污染与清洁进展，卷3：颗粒污染物清除方法

ISBN: 9781437778854 出版年：2011 页码：259 Kohli, Rajiv Mittal, Kashmiri L William Andrew_RM

The contributions in this volume cover methods for removal of particle contaminants on surfaces. Several of these methods are well established and have been employed in industrial applications for a long time. However, the ever- higher demand for removal of smaller particles on newer substrate materials is driving continuous development of the established cleaning methods and alternative innovative methods for particle removal. This book provides information on the latest developments in this topic area.Comprehensive coverage of innovations in surface contamination and cleaningWritten by established experts in the contamination and cleaning fieldEach chapter is a comprehensive review of the state of the artCase studies included