MEMS —— Design and Fabrication

----- MEMS:设计与制作

ISBN: 9780849391385 出版年：2005 页码：678 CRC Press

Introduction Mohamed Gad-el-Hak Materials for Microelectromechanical Systems Christian A. Zorman, Mehran Mehregany, and J. Jay McMahon MEMS Fabrication Guangyao Jia and Marc J. Madou LIGA and Micromolding Guangyao Jia and Marc J. Madou X-Ray Based Fabrication Todd Christenson EFAB(R) Technology and Applications Adam L. Cohen and Chris A. Bang Single-Crystal Silicon Carbide MEMS: Fabrication, Characterization, and Reliability Robert S. Okojie Deep Reactive Ion Etching for Bulk Micromachining of Silicon Carbide Glenn M. Beheim and Laura J. Evans Polymer Microsystems: Materials and Fabrication Gary M. Atkinson and Zoubeida Ounaies Optical Diagnostics to Investigate the Entrance Length in Microchannels Sang-Youp Lee, Jaesung Jang, and Steven T. Wereley Microfabricated Chemical Sensors for Aerospace Applications Gary W. Hunter, Jennifer C. Xu, Chung-Chiun Liu, and Darby B. Makel Packaging of Harsh Environment MEMS Devices Liang-Yu Chen and Jih-Fen Lei Fabrication Technologies for Nanoelectromechanical Systems Gary H. Bernstein, Holly V. Goodson, and Gregory L. Snider Molecular Self-Assembly: Fundamental Concepts and Applications Jill A. Miwa and Federico Rosei Index