MEMS —— Applications

----- MEMS:应用

ISBN: 9780849391392 出版年：2005 页码：576 CRC Press

As our knowledge of microelectromechanical systems (MEMS) continues to grow, so does The MEMS Handbook. The field has changed so much that this Second Edition is now available in three volumes. Individually, each volume provides focused, authoritative treatment of specific areas of interest. Together, they comprise the most comprehensive collection