Contents. Part 1: General Aspects of Electron Cyclotron Resonance Plasmas. Part 2: Specific Aspects of Electron Cyclotron Resonance Ion Sources. Part 3: Electron Cyclotron Resonance Ion Sources for Single or Low Charged Ions. Part 4: Electron Cyclotron Resonance Ion Sources for Multiply Charged Ions. Conclusions. Appendices. Index.
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