Particle Control for Semiconductor Manufacturing

ISBN: 9780824782429 出版年：2018 页码：481 Donovan Routledge

There is something Alice-in-Wonderlandish about powerful and vital computer systems being shut down by a microscopic mote that a hay-feverist wouldn't sneeze at, but as computer chips get smaller, smaller and smaller particles on their surface have a larger and larger effect on their performance. In