Ultra-Clean Technology Handbook —— Volume 1: Ultra-Pure Water

----- 超净技术手册 第1卷：超纯净水

ISBN: 9780367402341 出版年：2017 页码：945 Ohmi CRC Press

Evaluating the effectiveness of conventional wet processes for cleaning silicon wafers in semiconductor production, this reference reveals concrete measures to improve ultrapure water quality reviewing the structure and physical characteristics of ultrapure water molecules. The volume is divided int