Optical Materials —— Microstructuring Surfaces with Off-Electrode Plasma

----- 光学材料：外电极等离子体的微结构表面

ISBN: 9781138197282 出版年：2017 页码：231 Kazanskiy, Nikolay L Kolpakov, Vsevolod A CRC Press

This reference book concentrates on microstructuring surfaces of optical materials with directed fluxes of off-electrode plasma generated by high-voltage gas discharge and developing methods and equipment related to this technique. It covers theoretical and experimental studies on the electrical and physical properties of high-voltage gas discharges used to generate plasma outside an electrode gap. A new class of methods and devices that makes it possible to implement a series of processes for fabricating diffraction microstructures on large format wafers is also discussed.