Nanoelectromechanical Systems

ISBN: 9781119005032 出版年：2015 页码：213 Laurent Duraffourg Julien Arcamone Wiley

This book will present the theoretical and technological elements of nanosystems. Among the different topics discussed, the authors include the electromechanical properties of NEMS, the scaling effects that give these their interesting properties for different applications and the current manufacturing processes. The authors aim to provide useful tools for future readers and will provide an accurate picture of current and future research in the field.