Measurement Technology for Micro-Nanometer Devices

ISBN: 9781118717967 出版年：2016 页码：344 Wendong Zhang Xiujian Chou Wiley

A fully comprehensive examination of state-of-the-art technologies for measurement at the small scale• Highlights the advanced research work from industry and academia in micro-nano devices test technology• Written at both introductory and advanced levels, provides the fundamentals and theories• Focuses on the measurement techniques for characterizing MEMS/NEMS devices