Handbook of Deposition Technologies for Films and Coatings —— Science, Applications and Technology

----- 薄膜与涂料沉积技术手册 第3版

ISBN: 9780815520313 出版年：2009 页码：931 Martin, Peter M William Andrew_RM

This 3e, edited by Peter M. Martin, PNNL 2005 Inventor of the Year, is an extensive update of the many improvements in deposition technologies, mechanisms, and applications. This long-awaited revision includes updated and new chapters on atomic layer deposition, cathodic arc deposition, sculpted thin films, polymer thin films and emerging technologies. Extensive material was added throughout the book, especially in the areas concerned with plasma-assisted vapor deposition processes and metallurgical coating applications.- Explains in depth the many recent improvements in deposition technologies and applications - Thoroughly explains deposition technologies and their current applications - Discusses the numerous 'frontier areas' for the applications of the products of deposition technology