Semiconductor Industrial Hygiene Handbook —— Monitoring, Ventiliation, Equipment and Ergonomics

----- 半导体工业卫生手册：监测，通风，设备和人体工程学

ISBN: 9780815513698 出版年：1995 页码：363 Baldwin, David G Manz, Paul C Williams, Michael E William Andrew_RM

This book provides a comprehensive review of the primary industrial hygiene topics relevant to semiconductor processing: chemical and physical agents, and ventilation systems. The book also has excellent chapters on newer industrial hygiene concerns that are not specific to the semiconductor industry: ergonomics, indoor air quality, personal protective equipment, plan review, and records retention. While much of the information in these chapters can be applied to all industries, the focus and orientation is specific to issues in the semiconductor industry.