Handbook of Ellipsometry

ISBN: 9780815514992 出版年:2005 页码:887 Tompkins, Harland Irene, Eugene A William Andrew_RM

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内容简介

Polarized Light and Ellipsometry.- Optical Physics of Materials.- Data Analysis for Spectroscopic Ellipsometry.- Optical Components and the Simple PCSA (polarizer, compensator, sample, analyzer) Ellipsometer.- Rotating Polarizer and Analyzer Ellipsometry.- Polarization Modulation Ellipsometry.- Multichannel Ellipsometry.- SiO2 Films- Theory and Application of Generalized Ellipsometry.- VUV Ellipsometry.- Spectroscopic Infrared-Ellipsometry.- Ellipsometry in Life Sciences.

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