Gaseous Electronics —— Theory and Practice

----- 气体电子学：理论实践

ISBN: 9780367391775 出版年：2005 页码：710 Raju, Gorur Govinda CRC Press

Collision Fundamentals Coordinate Systems Meaning of Velocity Space Maxwell's Distribution Function Mean Free Path Particle Collisions Potential Functions for Particle Interactions Quantum Mechanical Approach to Scattering References Experimental Methods Total Collision Cross Sections Differential Cross Sections Ionization Cross Section Total Excitation Cross Section Attachment Cross Section Concluding Remarks References Data on Cross Sections-I. Rare Gases Argon Helium Krypton Neon Xenon Concluding Remarks References Data on Cross Sections-II. Diatomic Gases Carbon Monoxide (CO) Molecular Hydrogen (H2) Molecular Nitrogen Molecular Oxygen (O2) Nitric Oxide (NO) Closing Remarks References Data on Cross Sections-III. Industrial Gases Carbon Dioxide (CO2) Hydrocarbon Gases CxHy Mercury Vapor Nitrous Oxide (N2O) Ozone (O3) Silane (SiH4) Sulfur Hexafluoride (SF6) Water Vapor (H2O) Plasma Processing Gases Other Gases Concluding Remarks References Drift and Diffusion of Electrons-I Definitions Drift and Diffusion Measurement Electron Energy Distribution Approximate Methods Data on Drift and Diffusion References Drift and Diffusion of Electrons-II: Complex Molecules Current Pulse due to Avalanche Arrival Time Spectrum Method Hydrocarbon Gases Nitrogen Compounds Plasma Industrial Gases Sulfur Hexafluoride (SF6) Water Vapor (H2O and D2O) Miscellaneous Gases Concluding Remarks References Ionization Coefficients-I: Non-Electron-Attaching Gases Discharge Development Current Growth in Uniform Fields Functional dependence of alpha/N on E/N Space Charge Effects Breakdown in Uniform Fields Multiplication in Non-Uniform Fields Recombination Data on Ionization Coefficients Molecular Gases (Non-Attaching) Other Gases (Non-Attaching) References Ionization and Attachment Coefficients-II: Electron-Attaching Gases Attachment Processes Current Growth in Attaching Gases Ionization and Attachment Coefficients Concluding Remarks References High Voltage Phenomena Types of Voltage High Direct Voltage Generation High Alternating Voltage Generation High Impulse Voltage Generation Ionization in Alternating Fields Sparking Voltages References Ionization in E x B Fields List of Symbols Brief Historical Note Electron Motion in Vacuum in E x B Fields Effective Reduced Electric Field (EREF) Experimental Setup Ionization Coefficients Experimental Data Secondary Ionization Coefficient Sparking Potentials Time Lags in E x B Crossed Fields Computational Methods Effective Collision Frequency Concluding Remarks References High Frequency Discharges Basic Plasma Phenomena Debye Length Bohm Sheath Model Plasma Frequency Plasma Conductivity Ambipolar Diffusion RF Plasma Power Absorbed Microwave Breakdown Laser Breakdown Concluding Remark References Appendices Index